Clean Actuator SC Series
A low-particle-emission clean actuator compliant with Clean Class 3 (ISO 14644-1)
SC Series: High-Rigidity, Compact, Low-Particle-Emission Clean Actuator
This actuator is compliant with Clean Class 3 (ISO 14644-1).
Featuring a U-shaped guide rail and a 4-point contact structure, the SC Series achieves high rigidity and a space-saving design. Its design is optimized for clean environments, making it ideal for integration into semiconductor manufacturing equipment, cleanrooms, and medical analysis devices.
PDF data for the maintenance manual is also available.
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- Particle generation is suppressed by the use of low-wear material for the sliding parts of the slide block.
- The center sheet adopts a stainless steel sheet made of low-particle-emission material.
- Particles are significantly reduced by suction from the suction port.
- Adoption of a stainless steel table increases rigidity compared to conventional aluminum tables.
- Equipped with a grease nipple as standard, and the lubrication hole can also be configured on the opposite side.
- A guide rail datum surface is standard, and a datum surface can also be installed on the opposite side.
Compliant with Clean Class 3 (ISO 14644-1) standards
- Air inside the ball screw actuator was drawn in through the suction port.
- 1 CF of air was sampled from the sampling tube at the bottom of the chamber, and the number of dust particles 0.1 µm or larger was measured.
Measurement Conditions：
Note: Clean Class 3 corresponds to Class 1 in U.S. Federal Standard 209D.
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