Surface Configuration Measuring Systems
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Surface and Flatness Measuring Systems for Large Discsspcm
NANOMETRO® FR series
Equipped with a rotating air table, it can measure the surface shape of disks up to φ1000mm,
such as ceramic plates for wafer polishing and lapping tables.
We provide software that supports various measurement methods,
including concentric circle measurement for detailed evaluation and radial measurement for preliminary evaluation. -
Precision Flatness Measuring Instrumentspme
Precision Flatness Measuring Instrument SF-640M
This is a large-scale measuring device developed as a precision evaluation system for workpieces such as molds, with a measuring range of 650 x 450 mm.
It applies the technology and know-how from our "NANOMETRO" ultra-precision measuring device for silicon wafers.
It can perform high-precision evaluation of flatness and edges, and allows evaluation of the planar shape in various formats such as bird's-eye views,
cross-sectional views, and contour lines. For measuring ranges exceeding the above size, please inquire. -
Measuring Resultsmeasuring
Flatness measurement of φ360 alumina ceramics
Application: Semiconductor manufacturing equipment
All dimensions subject to alteration without notice.
MENU
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1.Specification Confirmation and Discussion
Please provide the following information first:
● Measuring workpiece...material, shape, size, etc.
● Evaluation items...flatness, straightness, parallelism, roughness, required accuracy, etc.
● Application...research and development, process control, shipping/receiving inspection, etc. -
2.Quotation Submission
Based on the information provided, we will create and propose the optimal quotation and specification sheet.
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3.Contract Signing
Upon agreement on the specifications, the order will be placed and a contract signed.
Inquiries About Products
Please contact us using the inquiry form or your nearest sales office.
