NANOMETRO® FR series
High-precision flatness measurement of ceramic plates and the like
Equipped with a rotating air table, it can measure the surface shape of disks up to φ1000mm,
such as ceramic plates for wafer polishing and lapping tables.
We provide software that supports various measurement methods,
including concentric circle measurement for detailed evaluation and radial measurement for preliminary evaluation.
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High-Precision Motion Mechanism!
Equipped with a rotating air table and a linear servo drive utilizing an air slider on the X-axis, based on KURODA's precision machining technology.
This enables high-speed, high-precision measurement of surface shapes of disks up to φ1000.
Capable of Evaluating Various Workpieces!
The optimal measurement head can be selected according to your desired evaluation items and target objects.
We will select the displacement meter (contact/non-contact) to match your workpiece.
It supports measurement of various workpieces such as metals, ceramics, glass, and various wafers.
Evaluation Methods According to Application!
Concentric Circle Measurement: Allows setting of measurement range, pitch, and rotation speed. Measures concentrically within the measurement range.Ideal for detailed evaluation.
Radial Measurement: Measures radially at arbitrarily set angles. Ideal for quick shape assessment to grasp an outline in a short time.
Easy Operation with Rich Display and Analysis!
Our self-developed software allows for display and analysis of measurement results according to your needs.
Arbitrary measurement pitch settings enable highly flexible measurements depending on the target workpiece size.
Our unique analysis system achieves high-precision reproducibility.
Supports Various Customizations!
Since both hardware and software are designed in-house, customization is possible according to your requests.
We provide optimal measurement solutions.
| Model |
NANOMETRO 700FR |
NANOMETRO 1000FR |
|---|---|---|
| Measuring area | φ700mm(max.) | φ1000mm(max.) |
| Overall accuracy | 0.4μm | 0.6μm |
| Repeatability | 0.05μm(σ) | |
| Display resolution | 0.01μm | |
| Measuring head | Electric micrometer | |
| Max. scanning speed (X axis) | 35mm/s | |
| Guide way |
X : Ceramics air guide ϴ : Air bearing |
|
| Drive system |
X : Linear motor ϴ : Servo motor |
|
| Maximum work mass | 60kg | 80kg |
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Inquiries About Products
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