Precision Flatness Measuring Instrument SF-640M
“Making the invisible visible”
This is a large-scale measuring device developed as a precision evaluation system for workpieces such as molds, with a measuring range of 650 x 450 mm.
It applies the technology and know-how from our "NANOMETRO" ultra-precision measuring device for silicon wafers.
It can perform high-precision evaluation of flatness and edges, and allows evaluation of the planar shape in various formats such as bird's-eye views,
cross-sectional views, and contour lines. For measuring ranges exceeding the above size, please inquire.
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High-precision Motion Mechanism!
Utilizing linear servo drives with air sliders on the X and Y axes, based on KURODA's precision machining technology, enables high-speed, high-precision measurement over a wide range.
Capable of Evaluating Various Workpieces!
The optimal measurement head can be selected according to your desired evaluation items and target objects.
We will select the displacement meter (contact/non-contact) to match your workpiece.
It supports measurement of various workpieces such as metals, ceramics, glass, and various wafers.
Easy Operation with Rich Display and Analysis!
Our self-developed software allows for display and analysis of measurement results according to your needs.
With a high degree of setting flexibility, measurement pitch and speed can be set arbitrarily.
Based on sales achievements cultivated through the NANOMETRO series, optimal evaluation can be performed according to the measurement target.
Supports Various Customizations!
Since both hardware and software are designed in-house, customization is possible according to your requests.
We provide optimal measurement solutions.
| Item | Contents | |
|---|---|---|
| Measuring area (X × Y） | 650mm × 450mm | |
| Overall accuracy | 0.6μm (*1) | |
| Repeatability | 0.1μm (*2) | |
| Display resolution | 0.01μm | |
| Measuring head | Non-contact laser stylus, Electric micrometer | |
| Minimum data interval | 1μm | |
| Scanning speed | 0.5 ～ 50mm/sec | |
| Scanning Guide way | Ceramics air slider | |
| Drive system |
X：Linear Servo motor Y：Servo motor |
|
| Maximum Work weight | 40kg | |
| Dimension | W1820mm × D1200mm × H1550mm | |
| Weight | 1000kg | |
| Power requirement | AC200V (50/60Hz) 15A | |
| Compressed air requirement | Clean and dry air 0.5MPa | |
| Air consumption | 100L/min (ANR) | |
| Maximum work height | 50mm | |
| Installation environment |
Ambient temperature: 20ºC to 25ºC (keep temperature fluctuation within 1ºC) Floor strength: Load capacity of 9,800N/m2 or more |
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Inquiries About Products
Please contact us using the inquiry form or your nearest sales office.
