Flatness measurement of φ360 alumina ceramics

  • Flatness measurement of φ360 alumina ceramics

Grinding measurement result for difficult-to-machine materials requiring high surface finish

Application: Semiconductor manufacturing equipment

Items Results

Workpiece

Material Al2O3
Size φ360 t=15(mm)

Accuracy

Flatness 1.54 μm

Machine model used

Machining equipment GSR-600
Measuring equipment SF-640M
NANOMETRO®700FR
Introduction to the Machining and Measurement Solution Room (Futtsu City, Chiba Prefecture)
  • Our "Machining and Measurement Solution Room," located within our Futtsu factory, features operational machines on display.
  • Test machining is available. Please share details such as workpiece size, shape, and target precision.
  • Consultation booths in the room are available to discuss your problems, issues, and questions until you are satisfied with the results.

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